CAS: 107-46-0 Molecular Formula: C6H18OSi2 MDL Number: MFCD00008265 InChI Key: UQEAIHBTYFGYIE-UHFFFAOYSA-N Synonym: hexamethyldisiloxane,disiloxane, hexamethyl,hexamethyl disiloxane,oxybis trimethylsilane,fluka ag,hmdso,bis trimethylsilyl ether,belsil dm 0.65,bis trimethylsilyl oxide PubChem CID: 24764 ChEBI: CHEBI:78002 IUPAC Name: trimethyl(trimethylsilyloxy)silane SMILES: C[Si](C)(C)O[Si](C)(C)C